Processing and simulation of few nm thick high-k dielectric films
| Title | Processing and simulation of few nm thick high-k dielectric films |
| Publication Type | Journal Article |
| Year of Publication | 2006 |
| Authors | Abermann, S, Jordan, C, Harasek, M, Bertagnolli, E |
| Journal | Microelectronic Engineering |
| Volume | 83 |
| Pagination | 1571–1572 |