@article {135,
	title = {Processing and simulation of few nm thick high-k dielectric films},
	journal = {Microelectronic Engineering},
	volume = {83},
	year = {2006},
	pages = {1571{\textendash}1572},
	author = {Abermann, Stephan and Jordan, Christian and Harasek, Michael and Bertagnolli, Emmerich}
}
